Below you will find pages that utilize the taxonomy term “Nanotube” Carbon nanotube fabrication heater On the fab floor, the bake steps are where the thermal budget for linewidth control gets set. A 2°C drift in soft bake or hard bake will shift CD... Read more...
Carbon nanotube fabrication heater On the fab floor, the bake steps are where the thermal budget for linewidth control gets set. A 2°C drift in soft bake or hard bake will shift CD... Read more...
