http://ir-heater-now.com/zh/tags/%E7%B3%BB%E7%BB%9F/ Recent content in 系统 on Immediate Infrared Heating Solutions Hugo zh Sat, 20 Jun 2026 01:57:12 +0800 http://ir-heater-now.com/zh/posts/halogen-lamp-for-rtp-system/ Sat, 20 Jun 2026 01:57:12 +0800 http://ir-heater-now.com/zh/posts/halogen-lamp-for-rtp-system/ <p><img src="http://ir-heater-now.com/images/eeeb9669114c0c0a0b2bef3f902d01a9.png" alt="RTP系统用卤素灯"></p> <p>在光刻工厂里，光阻烘烤过程中，晶圆表面的温度可能会发生0.2°C的波动。这样的微小变化就会影响光刻工艺的精度和成品率。在RTP系统中，那盏灯不仅仅是一个热源，它还决定了整个系统的温度均匀性和重复性。</p>