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				<title>涂布机开发者红外加热器</title>
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				<description>&lt;p&gt;&lt;img src=&#34;http://ir-heater-now.com/images/e619a459508a95cd74ea4eae0be40cd1.png&#34; alt=&#34;涂布机开发者红外加热器&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;在光刻车间，软烘烤温度漂移1°C会导致关键尺寸偏差。你会在晶圆上看到线宽变化——这就是废掉数小时工艺工作的原因。&lt;br&gt;&#xA;涂布/显影机的红外加热器是光刻胶处理的热源核心：软烘烤、硬烘烤和干燥。如果热均匀性出现偏差，良率也会随之下降。&lt;/p&gt;</description>
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